journal article·2016-09-01Open access

Stress relaxation in pulsed DC electromigration measurements

I. J. Ringler, J. R. Lloyd

AIP Advances· Volume 6· Issue 9

Abstract

When a high current density is applied to a conductor, it activates several driving forces for mass transport that can lead to device failure, the most prominent of which is electromigration. However, there are other driving forces operating as well that can counteract or add to the effects of electromigration. A major driving force is a stress gradient that is developed as a response to electromigration in the presence of a blocking boundary condition. When the electrical stress is interrupted by pulsing DC measurements at low frequency, relaxation of the stress is observed through longer lifetime.
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Research context

OpenAlex topics: Copper Interconnects and Reliability · Metal and Thin Film Mechanics · Semiconductor materials and devices

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Affiliations

SUNY Polytechnic Institute , Albany, New York 12203, USA

References (9)

Show source-provided references
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