A high accuracy algorithm of displacement measurement for a micro-positioning stage
Source abstract
Abstract
A high accuracy displacement measurement algorithm for a two degrees of freedom compliant precision micro-positioning stage is proposed based on the computer micro-vision technique. The algorithm consists of an integer-pixel and a subpixel matching procedure. Series of simulations are conducted to verify the proposed method. The results show that the proposed algorithm possesses the advantages of high precision and stability, the resolution can attain to 0.01 pixel theoretically. In addition, the consuming time is reduced about 6.7 times compared with the classical normalized cross correlation algorithm. To validate the practical performance of the proposed algorithm, a laser interferometer measurement system (LIMS) is built up. The experimental results demonstrate that the algorithm has better adaptability than that of the LIMS.
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Research context
OpenAlex topics: Optical measurement and interference techniques · Advanced Measurement and Metrology Techniques · Piezoelectric Actuators and Control
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
South China University of Technology Guangdong Provincial Key Laboratory of Precision Equipment and Manufacturing Technology, School of Mechanical and Automotive Engineering, , Guangzhou 510640, China
Funding
Scientific and technological project of Guangzhou · National Natural Science Foundation of China · Natural Science Foundation of Guangdong Province
References (34)
Show source-provided references
1. 2001
2. Topology synthesis of large-displacement compliant mechanisms10.1002/nme.148 ↗
3. Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage10.1016/j.mechmachtheory.2007.04.009 ↗
4. Compliant mechanism design using multi-objective topology optimization scheme of continuum structures10.1007/s00158-004-0512-y ↗
5. Design of micro-positioning stage with flexure hinge10.3788/ope.20142202.0338 ↗
6. Robust adaptive constrained motion tracking control of piezo-actuated flexure-based mechanisms for micro/nano manipulation10.1109/tie.2010.2050413 ↗
7. Design, identification, and control of a flexure-based XY stage for fast nanoscale positioning10.1109/TNANO.2008.2005829 ↗
8. Design of single-axis flexure hinges using continuum topology optimization method10.1007/s11431-013-5446-4 ↗
9. On the design of compliant mechanisms using topology optimization*10.1080/08905459708945415 ↗
10. Level-set methods for structural topology optimization: A review10.1007/s00158-013-0912-y ↗
11. Structural optimization using sensitivity analysis and a level-set method10.1016/j.jcp.2003.09.032 ↗
12. A planar 3-DOF nanopositioning platform with large magnification10.1016/j.precisioneng.2016.04.016 ↗
13. Level set-based topology optimization of hinge-free compliant mechanisms using a two-step elastic modeling method10.1115/1.4026097 ↗
14. Optical methods for distance and displacement measurements10.1364/AOP.4.000441 ↗
15. Two-dimensional digital image correlation for in-plane displacement and strain measurement: A review10.1088/0957-0233/20/6/062001 ↗
16. 3-D computer vision in experimental mechanics10.1016/j.optlaseng.2007.11.009 ↗
17. Overview of three-dimensional shape measurement using optical methods10.1117/1.602438 ↗
18. Three-dimensional measurements: A review of technologies and applications10.1108/02602281011022670 ↗
19. A high speed and high precision displacement measurement method using double grating scales
20. Real-time displacement measurement of a flexible bridge using digital image processing techniques10.1007/s11340-006-6124-2 ↗
21. Three-dimensional displacement measurements using digital image correlation and photogrammic analysis10.1007/bf02322695 ↗
22. Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements10.1364/OE.23.002451 ↗
23. Displacement measurement system for inverters using computer micro-vision10.1016/j.optlaseng.2015.12.018 ↗
24. An efficient algorithm for exhaustive template matching based on normalized cross correlation
25. Fast normalized cross-correlation
26. A fast normalized cross-correlation calculation method for motion estimation10.1109/tuffc.2010.1554 ↗
27. Fast normalized cross correlation for defect detection10.1016/s0167-8655(03)00106-5 ↗
28. A new algorithm of fast computing geometric moments for gray level image based on differential moments factor
29. Performance of gradient operators in gradient-based optical flow estimation
30. Performance of gradient operators in algorithm of gradient-based subpixel registration
31. Performance of optical flow techniques10.1007/bf01420984 ↗
32. Measurement of short shaft power based on a digital speckle correlation method10.1088/0957-0233/26/4/045001 ↗
33. Template matching in pyramids10.1016/0146-664x(81)90046-0 ↗
34. Subpixel displacement and deformation gradient measurement using digital image/speckle correlation (DISC)10.1117/1.1387992 ↗