Structure of high-reflectance La/B-based multilayer mirrors with partial La nitridation
Source abstract
Abstract
We investigate a hybrid thin film deposition procedure that significantly enhances reflectivity of La/B based nanoscale multilayer structures to be used as Extreme UV mirrors at 6.7 nm wavelength and beyond. We have analyzed the La-nitridation process in detail, and proposed a growth mechanism and deposition procedure for full, stoichiometric passivation of La, avoiding the formation of optically unfavorable BN formation at the LaN-on-B interface. A partial nitridation was applied and studied as a function of the nitridation delay.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Optical Coatings and Gratings · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
University of Twente Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, , P.O. Box 217, 7500 AE Enschede, The Netherlands
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