Effect of thermal annealing on structural properties of GeSn thin films grown by molecular beam epitaxy
Abstract
Research context
OpenAlex topics: Photonic and Optical Devices · Semiconductor Lasers and Optical Devices · Advanced Photonic Communication Systems
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Affiliations
State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences 1 , Shanghai 200050, China
School of Physical Science and Technology, ShanghaiTech University 2 , Shanghai 201210, China
University of Chinese Academy of Sciences, Chinese Academy of Sciences 3 , Beijing 100190, China
State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Laboratory on Navigation and Location-Based Service and Center of Quantum Information Sensing and Processing, Shanghai Jiao Tong University 5 , Shanghai 200240, China
Department of Microtechnology and Nanoscience, Chalmers University of Technology 4 , Gothenburg 41296, Sweden
Funding
Creative Research Group Project of Natural Science Foundation of China · National Natural Science Foundation of China