Analysis of a three-stator multi-degree-of-freedom piezoelectric actuator based on symmetrical distribution

In this paper, a piezoelectric actuator with three symmetrical distributions is designed. Piezoelectric ceramics are polarized in a set manner. The excitation voltage signals of the same amplitude and different phases are applied to the actuator, and an elliptical trajectory is generated on the driving foot to drive the slide rail to move. Its driving principle is different from that of previous drivers of this type. For example, when moving in a certain direction, the horizontal displacement is formed by a mixture of the longitudinal vibration of one sub-actuator and the bending vibration of two sub-actuators, while the vertical displacement is generated by the bending vibration of the actuator. Through the close cooperation of the three sub-actuators, the output efficiency is greatly improved. The actuator is suitable for small high-precision control. First, the overall structure and working principle of the piezoelectric actuator are briefly introduced. Then, through the finite element analysis, the working mode with output performance and the motion track on the driving foot are analyzed. Finally, the output performance of the actuator is analyzed. When the voltage frequency is 200 Hz and the amplitude is 200 V, the maximum output speed is 5.1 mm/s and the maximum load of about 1.2 kg can be applied, which verifies that the actuator has good driving ability.