journal article·2019-03-01Open access

Outdoor use stability improvement of the baseline output from a quartz oscillator pressure sensor

Atsushi Suzuki

AIP Advances· Volume 9· Issue 3

Abstract

Stability of the output obtained from a pressure sensor using a quartz oscillator for outdoor measurement was improved by the normalization of pressure and temperature changes. Maximum fluctuation ratio, which is the index of the fluctuation, was reduced sufficiently to a practical level by the present pressure- and temperature- normalization. This level corresponds to the degree of the level which shows 0.33% of the output, which is in agreement with the application for hydrogen sensing.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Acoustic Wave Resonator Technologies · Gas Sensing Nanomaterials and Sensors · Geophysics and Sensor Technology

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

National Institute of Advanced Industrial Science and Technology (AIST), Japan , Tsukuba Central 2, Umezono 1-1-1 Tsukuba, Ibaraki 305-8568, Japan

Funding

National Institute of Advanced Industrial Science and Technology · Japan Society for the Promotion of Science

References (46)

Show source-provided references
1. J. Vac. Sci. Technol. A · 1985 · 3 · 174610.1116/1.573012 ↗
2. Vacuum · 1984 · 34 · 73110.1016/0042-207x(84)90318-x ↗
3. Sens. Actuators, A · 2006 · 127 · 3710.1016/j.sna.2005.11.009 ↗
4. J. Chem. Phys. · 1950 · 18 · 51710.1063/1.1747673 ↗
5. Int. J. Hydrogen Energy · 2008 · 33 · 638510.1016/j.ijhydene.2008.07.051 ↗
6. J. Vac. Sci. Technol. A · 1985 · 3 · 218410.1116/1.573275 ↗
7. J. Vac. Sci. Technol. A · 1985 · 3 · 174210.1116/1.573011 ↗
8. J. Vac. Sci. Technol. A · 1987 · 5 · 239310.1116/1.574461 ↗
9. J. Vac. Sci. Technol. A · 1987 · 5 · 245010.1116/1.574869 ↗
10. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1992 · 10 · 1910.1116/1.586300 ↗
11. J. Vac. Sci. Technol. A · 2004 · 22 · 199210.1116/1.1776181 ↗
12. J. Vac. Sci. Technol. A · 2007 · 25 · 124610.1116/1.2747626 ↗
13. J. Vac. Sci. Technol. A · 2008 · 26 · 35210.1116/1.2897314 ↗
14. Shinku · 2005 · 48 · 13910.3131/jvsj.48.139 ↗
15. Shinku · 2007 · 50 · 18410.3131/jvsj.50.184 ↗
16. 2008
17. J. Vac. Soc. Jpn. · 2008 · 51 · 15510.3131/jvsj2.51.155 ↗
18. Jpn. J. Appl. Phys. · 2008 · 47 · 366110.1143/jjap.47.3661 ↗
19. J. Vac. Soc. Jpn. · 2009 · 52 · 12110.3131/jvsj2.52.121 ↗
20. Vacuum · 2009 · 84 · 55410.1016/j.vacuum.2009.06.037 ↗
21. Rev. Sci. Instrum. · 2009 · 80 · 09510910.1063/1.3223345 ↗
22. 2010
23. Vacuum · 2010 · 84 · 138910.1016/j.vacuum.2010.01.004 ↗
24. J. Vac. Soc. Jpn. · 2010 · 53 · 16210.3131/jvsj2.53.162 ↗
25. J. Vac. Soc. Jpn. · 2011 · 54 · 14610.3131/jvsj2.54.146 ↗
26. Jpn. J. Appl. Phys. · 2011 · 50 · 01AA0310.7567/jjap.50.01aa03 ↗
27. Jpn. J. Appl. Phys. · 2012 · 51 · 01AA0310.7567/jjap.51.01aa03 ↗
28. Hydrogen sensing characteristics of a quartz oscillator
29. J. Vac. Soc. Jpn. · 2013 · 56 · 33010.3131/jvsj2.56.330 ↗
30. Jpn. J. Appl. Phys. · 2013 · 52 · 11NC0410.7567/jjap.52.11nc04 ↗
31. 2013
32. Jpn. J. Appl. Phys. · 2014 · 53 · 11RC0310.7567/jjap.53.11rc03 ↗
33. J. Vac. Soc. Jpn. · 2015 · 58 · 17710.3131/jvsj2.58.177 ↗
34. J. Vac. Soc. Jpn. · 2015 · 58 · 18110.3131/jvsj2.58.181 ↗
35. Vacuum · 2015 · 121 · 25510.1016/j.vacuum.2015.03.020 ↗
36. J. Vac. Soc. Jpn. · 2016 · 59 · 9610.3131/jvsj2.59.96 ↗
37. J. Vac. Sci. Technol. A · 2016 · 34 · 03160410.1116/1.4946757 ↗
38. Appl. Sci. Convergence Technol. · 2016 · 25 · 12410.5757/asct.2016.25.6.124 ↗
39. J. Vac. Soc. Jpn. · 2017 · 60 · 49910.3131/jvsj2.60.499 ↗
40. J. Vac. Soc. Jpn. · 2017 · 60 · 13110.3131/jvsj2.60.131 ↗
41. Vacuum · 1993 · 44 · 61310.1016/0042-207x(93)90109-n ↗
42. Shinku · 1994 · 37 · 40310.3131/jvsj.37.403 ↗
43. Vacuum · 1996 · 47 · 47910.1016/0042-207x(96)00004-8 ↗
44. Sens. Actuators, A · 1997 · 58 · 18510.1016/s0924-4247(97)01390-3 ↗
45. 1970
46. 2005