Small angle x-ray scattering (SAXS) and Q-space weighting filter for ×3 CD-extraction accuracy improvement
Source abstract
Abstract
A small angle x-ray scattering simulator has been developed for metrology and inspection applications based on the first Born approximation considering non-ideal equipment-related factors. The simulator shows good reproducibility in various device structures and measurement environments, including slit-configurations and incident angles. In addition, a Q-space adaptive weighting method is proposed to enhance about 300% accuracy, especially on non-single repeated pitch structures such as VNAND with complex x-ray diffraction patterns.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Advancements in Photolithography Techniques · Non-Destructive Testing Techniques · Electron and X-Ray Spectroscopy Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Data and Information Technology Center, Samsung Electronics 1 , Banwol-dong, Hwaseong-si, Gyeoneggi-do 18448, South Korea
Semiconductor R&D Center, Samsung Electronics 2 , Banwol-dong, Hwaseong-si, Gyeoneggi-do 18448, South Korea
Samsung R&D Institute Japan 3 , Sugasawa-cho, Tsurumi-ku, Yokohama-shi, Kanagawa-ken 230-0027, Japan
References (15)
Show source-provided references
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