Publisher’s Note: “Growth of residual stress-free ZnO films on SiO2/Si substrate at room temperature for MEMS devices” [AIP Advances 5, 067140 (2015)]
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Abstract
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: ZnO doping and properties
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
CSIR-Central Electronics Engineering Research Institute 1 Sensors & Nanotechnology Group, , Pilani, Rajasthan 333031, India
Indian Institute of Technology Jodhpur 2 Department of Electrical Engineering, , Jodhpur 342011, India
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