Anti-disturbance control of a piezo-driven micromanipulator with a non-minimum phase
Source abstract
Abstract
In precision micromanipulation tasks, operation accuracy and anti-disturbance performance of micromanipulators are critical. This paper presents anti-disturbance control for a piezo-driven micromanipulator with a non-minimum phase. The micromanipulator is constructed by mounting a flexible manipulator on a parallel positioning stage. The micromotion and dynamic behavior of the micromanipulator are analyzed. Then, an anti-disturbance control strategy combining H-infinity feedback control and disturbance observer-based control for a non-minimum phase is designed to reduce disturbances and ensure control accuracy. Finally, the experimental measurement and control system is built. The observed phenomena show that sinusoidal disturbances are almost eliminated and the overshoot of step disturbances is significantly reduced. In addition, the time for suppressing the step disturbance is shortened from 0.9 to 0.3 s. Experiments verify the viability of the anti-disturbance control strategy.
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Research context
OpenAlex topics: Piezoelectric Actuators and Control · Advanced MEMS and NEMS Technologies · Neuroscience and Neural Engineering
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Part Rolling Key Laboratory of Zhejiang Province, The College of Mechanical Engineering and Mechanics, Ningbo University 1 , Ningbo 315211, China
State Key Laboratory of Fluid Power and Mechatronic Systems,The College of Mechanical Engineering, Zhejiang University 2 , Hangzhou 310027, China
Funding
Zhejiang Provincial Natural Science Foundation of China · National Natural Science Foundation of China · Ningbo City Natural Science Foundation of China · Ningbo Science and Technology Innovation 2025 Major Special Fund
References (27)
Show source-provided references
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