Particle distribution functions at plasma–surface interface
Source abstract
Abstract
Particle simulations of bounded plasmas require assumptions on the distribution function of the incoming particles at the plasma–surface interface. Two independent distributions are usually defined, one angular and one energy dependent, disregarding the unified distribution as a whole. In this paper, two types of angular distribution (isotropic and cosine-type) and three types of energy distribution (energy dependent, uniform, and mono-energetic) are compared in a correlated manner via the resulting velocity distribution functions. Examples of incorrectly defined angular distributions are included. Numerical algorithms are indicated for the generation of the discussed distributions. Calculations of the incoming average velocity of the particles, directed perpendicularly to the surface, show the effect of each distribution on subsequent calculations.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Laser-induced spectroscopy and plasma · Dust and Plasma Wave Phenomena · Plasma Diagnostics and Applications
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Affiliations
Iasi Plasma Advanced Research Center (IPARC), Faculty of Physics, Alexandru Ioan Cuza University of Iasi , Iasi 700506, Romania
Funding
Ministry of Education and Research, Romania
References (21)
Show source-provided references
1. The correct and incorrect generation of a cosine distribution of scattered particles for Monte-Carlo modelling of vacuum systems10.1016/s0042-207x(02)00173-2 ↗
2. Modeling and simulations of plasma and sheath edges in warm-ion collision-free discharges10.1063/1.5044664 ↗
3. Effect of total emitted electron velocity distribution function on the plasma sheath near a floating wall10.1063/1.5000507 ↗
4. Electron transport in magnetrons by a posteriori Monte Carlo simulations10.1088/0963-0252/23/1/015012 ↗
5. Multipactor electron discharge physics using an improved secondary emission model10.1063/1.872811 ↗
6. The role of electron induced secondary electron emission from SiO2 surfaces in capacitively coupled radio frequency plasmas operated at low pressures10.1088/1361-6595/aa963d ↗
7. 2D PIC-MCC simulations of magnetron plasma in HiPIMS regime with external circuit10.1088/1361-6595/aadebe ↗
8. Angular, energy, and mass distribution of sputtered particles10.1007/3-540-53428-8 ↗
9. Energy and angular distributions of sputtered species
10. Characteristics of reflected gas molecules at a solid surface10.1063/1.2191871 ↗
11. Monte Carlo modeling of secondary electron emission and its incorporation in particle simulations of electron–surface interaction10.1016/j.cpc.2011.03.002 ↗
12. Calculation of the effective gas interaction probabilities of the secondary electrons in a dc magnetron discharge10.1088/0022-3727/37/12/008 ↗
13. Classical chaos and ballistic transport in a mesoscopic channel10.1103/physrevb.54.11410 ↗
14. An experiment on the velocity distribution of thermionic electrons10.1119/1.3471937 ↗
15. II. The energy spectrum of ejected atoms during the high energy sputtering of gold10.1080/14786436808227358 ↗
16. Simple calculation of energy distribution of low energy secondary electrons emitted from metals under electron bombardment10.1063/1.1663306 ↗
17. 1998
18. New developments in the calculation of the molecular flow conductance of a straight cylinder10.1116/1.572060 ↗
19. Angular distribution of sputtered material10.1063/1.1735395 ↗
20. Over-cosine angular distributions of sputtered atoms at normal incidence10.1016/0168-583x(89)90704-0 ↗
21. Ti–Ar scattering cross sections by direct comparison of Monte Carlo simulations and laser-induced fluorescence spectroscopy in magnetron discharges10.1088/0022-3727/46/17/175201 ↗