A piezoelectric stick–slip drive nanopositioner with large velocity under high load
Source abstract
Abstract
Piezoelectric stick–slip drive nanopositioners are of central importance in in situ SEM nanorobotic systems due to their high precise positioning, large stroke, high speed, and compact structure. However, the output velocity under high load will be seriously influenced. In this paper, a new piezoelectric stick–slip drive nanopositioner with large velocity under high load by introducing the adjust bolts to decouple the driving unit and moving unit is presented. A MATLAB simulation model has been created to optimize the nanopositioner for a certain velocity, and a FEM is used to confirm that the leaf hinge has sufficient stiffness. The size of the prototype is 30 × 32 × 25 mm3. Testing results indicate that the nanopositioner achieves a maximum velocity of 3.467 mm/s and a minimum resolution of 6 nm. When the load increases from 0.4 kg to 2 kg, the maximum velocities only decrease from 3.457 mm/s to 3.143 mm/s. The proposed piezoelectric stick–slip nanopositioner shows large velocity under high load.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Force Microscopy Techniques and Applications · Mechanical and Optical Resonators · Adhesion, Friction, and Surface Interactions
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Mechanical and Electrical Engineering, Soochow University 1 , Suzhou 215021, China
Department of Mechanical Engineering, McGill University 2 , Montreal, Quebec H3A0C3, Canada
School of Mechatronic Engineering and Automation, Shanghai University 3 , Shanghai 200072, China
Research Center of Robotics and Micro Systems, Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University 4 , Suzhou 215021, China
Funding
the Construction Project of Suzhou Late-Model R&D Institutions · National Natural Science Foundation of China
References (31)
Show source-provided references
1. Fatikow · 2007
2. 2011
3. Calibration of micro and nanorobotic systems: Contribution of influential parameters to the geometric accuracy
4. Fast, multi-frequency, and quantitative nanomechanical mapping of live cells using the atomic force microscope10.1038/srep11692 ↗
5. Imaging modes of atomic force microscopy for application in molecular and cell biology10.1038/nnano.2017.45 ↗
6. Evaluating mechanical properties and crack resistance of CrN, CrTiN, CrAlN and CrTiAlN coatings by nanoindentation and scratch tests10.1016/j.surfcoat.2015.11.040 ↗
7. Nanoindentation study of electrodeposited Ag thin coating: An inverse calculation of anisotropic elastic-plastic properties10.1016/j.surfcoat.2016.12.056 ↗
8. Automated robotic manipulation of individual colloidal particles using vision-based control10.1109/TMECH.2014.2361271 ↗
9. Improvements of piezo-actuated stick–slip micro-drives: Modeling and driving waveform10.3390/coatings8020062 ↗
10. Optimal design of a planar parallel 3-DOF nanopositioner with multi-objective10.1016/j.mechmachtheory.2017.02.005 ↗
11. High-speed XYZ-nanopositioner for scanning ion conductance microscopy10.1063/1.4993296 ↗
12. Fast trajectory tracking of a flexure-based, multiaxis nanopositioner with 50-mm travel10.1109/tmech.2018.2871162 ↗
13. An inchworm type piezoelectric actuator working in resonant state10.1109/access.2018.2814010 ↗
14. Stepping piezoelectric actuators with large working stroke for nano-positioning systems: A review10.1016/j.sna.2019.04.006 ↗
15. Optimal and intelligent motion control scheme for an ultrasonic-motor-driven XY stage10.1016/j.mechatronics.2019.03.004 ↗
16. A two-dimensional nano-positioner: Design, modelling and experiments10.1016/j.rcim.2017.03.003 ↗
17. A review of stick–slip nanopositioning actuators10.1007/978-3-319-23853-1_1 ↗
18. Nanoscale manipulation under scanning electron microscopy
19. Slip-stick step-scanner for scanning probe microscopy10.1063/1.1927105 ↗
20. A stick-slip positioning stage robust to load variations10.1109/tmech.2016.2517102 ↗
21. A piezoelectric stick-slip nanopositioning stage with ultra-high load capacity realizing by decoupling the driving and moving units10.1109/access.2019.2944840 ↗
22. Simple and high-performance stick-slip piezoelectric actuator based on an asymmetrical flexure hinge driving mechanism10.1177/1045389x19862376 ↗
23. A novel stick-slip based linear actuator using bi-directional motion of micropositioner10.1016/j.ymssp.2019.03.025 ↗
24. A novel trapezoid-type stick–slip piezoelectric linear actuator using right circular flexure hinge mechanism10.1109/tie.2017.2677318 ↗
25. The dynamics study of the stick-slip driving system based on LuGre dynamic friction model
26. Actionneurs “stick and slip” pour micro-manipulateurs
27. Modeling of stick-slip micro-drives10.1007/s12213-011-0034-9 ↗
28. Howell · 201310.1002/9781118516485 ↗
29. Design, analysis, and testing of a flexure-based vibration-assisted polishing device10.1063/1.5025498 ↗
30. Modeling and waveform optimization of stick–slip micro-drives using the method of dimensionality reduction10.1007/s00419-014-0934-y ↗
31. A cost-effective voice coil motor-based portable micro-indentation device for in situ testing10.1016/j.measurement.2020.108105 ↗