Two-dimensional synchronous motion modulation MEMS structure for suppressing 1/f noise in magnetoresistive sensors

Magnetoresistive (MR) sensors have great application prospects in the field of weak magnetic field detection due to their high sensitivity, small size, and low power consumption. However, 1/f noise greatly limits the low-frequency detectivity of MR sensors. In order to suppress 1/f noise, this paper proposes a two-dimensional synchronous motion modulation (TDSMM) structure based on microelectromechanical systems (MEMS). This structure can effectively reduce 1/f noise by modulating the frequency of the measured magnetic field in the high-frequency band. Theoretical analysis and finite element simulation were conducted on three different modulation models: TSDMM, magnetic flux concentrators motion modulation, and MR components longitudinal motion modulation. The results showed that the modulation efficiency of the TDSMM reached as high as 127%, which is currently the highest value in MR-MEMS sensors. The TDSMM MEMS structure has been successfully manufactured, and the resonant frequency of the transverse resonator is twice that of the longitudinal resonator, enabling extremely high modulation efficiency. The noise spectral density of giant-magnetoresistive components on a silicon-on-insulator substrate was tested, and the noise level in the high-frequency band was three orders of magnitude lower than that in the low-frequency band. These results position MR-MEMS sensors with TDSMM structures as highly competitive candidates in the field of ultra-weak magnetic field detection.