CoFeBX layers for MgO-based magnetic tunnel junction sensors with improved magnetoresistance and noise performance
Source abstract
Abstract
Magnetoresistive sensors have been enthusiastically selected for applications requiring magnetic field detection with small footprint sensors. The optimisation of the sensor response includes using soft magnetic free layers, based on CoFeB and NiFe alloys. Here we report the TMR and noise performance of magnetically saturated in-plane MTJ sensors including CoFeBTa and CoFeSiB soft magnetic films as free layers (FL). Assessing magneto-crystalline anisotropy μ0Hk values of 2.1 and 0.7 mT in CoFeB 2.5 (nm)/Ru 0.2/CoFeBTa 4 and CoFeB 3/Ru 0.2/CoFeSiB 4 compared to 1.7 mT in CoFeB 2.5/Ru 0.2/NiFe 4, together with an improved magnetoresistance of 230% in CoFeBSi comparing with 170% (NiFe) with superior noise characteristics, with Hooge parameter of αH = 7 × 10−11 μm2.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Magnetic properties of thin films · Magnetic Field Sensors Techniques · ZnO doping and properties
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
INESC - Microsistemas e Nanotecnologias 1 , Rua Alves Redol, 9, Lisbon 1000-029, Portugal
Instituto Superior Tecnico - Universidade de Lisboa 2 , Lisboa, Portugal
Funding
Fundação para a Ciência e a Tecnologia
References (17)
Show source-provided references
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