A theoretical model and analysis of composite membrane of a piezoresistive pressure sensor
Source abstract
Abstract
In this paper, an analytical model of the composite membrane piezoresistive pressure sensor with the testing structure is established, which built the relationship between the electrostatic force and the material properties, dimension parameters of the sensor. By using the theoretical model of the sensor, it is easily to analyze the sensor’s performance, to optimize the dimension of the sensor, and to make the step of calibrating to be getting fast and accurate.
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Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Mechanical and Optical Resonators · Analytical Chemistry and Sensors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Southeast University Key Laboratory of MEMS of Ministry of Education, , Nanjing 210096, China
Funding
national key technology support program of China · National Natural Science Foundation of China
References (29)
Show source-provided references
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