journal article·2019-06-01Open access

Novel spatially coordinated in-situ Raman and nanoscale wear analysis of FCVA-deposited DLC film

Mehdi Rouhani, Jonathan Hobley, Franklin Chau-Nan Hong, Yeau-Ren Jeng

AIP Advances· Volume 9· Issue 6

Abstract

A novel combined in-situ system, integrating Raman spectroscopy and depth-sensing techniques, was applied to analyze the wear induced transformation on the microstructure of diamond-like carbon (DLC) film deposited on Si substrates using a filtered cathodic arc vacuum (FCVA) deposition system. Using this synchronized characterization technique it was demonstrated that upon wear-induced removal of upper surface layers, the intensity ratio (ID/IG) for the area inside wear tracks decreases. On the other hand, while the peak position for the D line (PD) shifts to higher wavenumbers, the peak position for the G line (PG) shifts to lower wavenumbers. The coefficient of friction shows significant reduction upon increasing the depth of the wear tracks. These results confirm our previous preliminary report on the possible existence of layers rich in sp2 in the surface region. It was also shown that the wear debris is more graphitized.
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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Force Microscopy Techniques and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Mechanical Engineering Department, National Chung Cheng University 1 , 168 University Road, Ming-Hsiung Township, Chia-Yi 62102, Taiwan

OndaLabs Consultancy, Deca Homes, Clark Freeport, Barangay Margot 2 , Angeles 2009, Philippines

Department of Chemical Engineering, National Cheng Kung University 3 , 1 University Road, Tainan City 70101, Taiwan

Department of Biomedical Engineering, National Cheng Kung University 4 , 1 University Road, Tainan City 70101, Taiwan

Intelligent Manufacturing Research Center (iMRC), National Cheng Kung University 5 , 1 University Road, Tainan City 70101, Taiwan

Medical Device Innovation Center (MDIC), National Cheng Kung University 6 , 1 University Road, Tainan City 70101, Taiwan

Funding

Ministry of Science and Technology, Taiwan · Air Force Office of Scientific Research

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