Optimization and simulation of MEMS rectilinear ion trap
Source abstract
Abstract
In this paper, the design of a MEMS rectilinear ion trap was optimized under simulated conditions. The size range of the MEMS rectilinear ion trap’s electrodes studied in this paper is measured at micron scale. SIMION software was used to simulate the MEMS rectilinear ion trap with different sizes and different radio-frequency signals. The ion-trapping efficiencies of the ion trap under these different simulation conditions were obtained. The ion-trapping efficiencies were compared to determine the performance of the MEMS rectilinear ion trap in different conditions and to find the optimum conditions. The simulation results show that for the ion trap at micron scale or smaller, the optimized length–width ratio was 0.8, and a higher frequency of radio-frequency signal is necessary to obtain a higher ion-trapping efficiency. These results have a guiding role in the process of developing MEMS rectilinear ion traps, and great application prospects in the research fields of the MEMS rectilinear ion trap and the MEMS mass spectrometer.
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Research context
OpenAlex topics: Mass Spectrometry Techniques and Applications · Electrohydrodynamics and Fluid Dynamics · Analytical chemistry methods development
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
National Key Laboratory of Human Factors Engineering, China Astronaut Research and Training Center 1 , Beijing 10094, China
Tsinghua University 2 Department of Precision Instrument, , Beijing, 100084, China
Funding
National Instrumentation Programme · National Natural Science Foundation of China · Natural Science Foundation of Beijing Municipality
References (14)
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