Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer-scale hole array structures
Abstract
Research context
OpenAlex topics: Mechanical and Optical Resonators · Advanced MEMS and NEMS Technologies · Thermal properties of materials
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Affiliations
Institute of Industrial Science, University of Tokyo 1 , 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
Institute of Engineering, Tokyo University of Agriculture and Technology 2 , Koganei, Tokyo, 184-8588, Japan
Institute for Nano Quantum Information Electronics, University of Tokyo 3 , 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
LIMMS/CNRS-IIS, UMI 2820 4 , 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
Funding
Ministry of Education, Culture, Sports, Science and Technology · Japan Society for the Promotion of Science · Collaborative Research Based on Industrial Demand