Temperature and humidity sensor based on MEMS technology
Source abstract
Abstract
This work presents a monolithically integrated temperature and humidity sensor based on microelectromechanical systems technology. The temperature sensor working on the “bi-metallic” effect has the advantages of wide temperature range, high sensitivity, and fast detection. The humidity sensor has a polyimide parallel plate capacitive structure with the microporous array on the upper electrode designed for high sensitivity and fast response. Numerical analysis and COMSOL simulation showed that the temperature detection sensitivity is 0.2 mV/°C in the range of 193–393 K and humidity sensitivity is 0.405 pF/% relative humidity (RH) with the response time of 34 s in the humidity range of 0%–100% RH. The integrated temperature and humidity sensor has the advantages of small dimension, wide detection range, high precision, and fast response.
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Research context
OpenAlex topics: Gas Sensing Nanomaterials and Sensors · Advanced Chemical Sensor Technologies · Analytical Chemistry and Sensors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
National and Local Joint Engineering Research Center for Reliability Technology of Energy Internet Intelligent Terminal Core Chip, Beijing Smart-Chip Microelectronics Technology Co., Ltd. 1 , Beijing 100192, China
Beijing Chip Identification Technology Co., Ltd. 2 , Beijing 102200, China
Smart Shine Microelectronics Technology Co., Ltd. 3 , Qingdao 266300, China
Institute of Semiconductors, Chinese Academy of Sciences 4 , Beijing 100083, China
Funding
National Natural Science Foundation of China
References (27)
Show source-provided references
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