Vibration optimization of ZnO thin film bulk acoustic resonator with ring electrodes

A rectangular ZnO thin film bulk acoustic resonator with ring electrodes is presented in this paper to demonstrate the existence of a nearly uniform displacement distribution at the central part of this typical resonator. The variational formulation based on two-dimensional scalar differential equations provides a theoretical foundation for the Ritz method adopted in our analysis. The resonant frequencies and vibration distributions for the thickness-extensional modes of this ring electrode resonator are obtained. The structural parameters are optimized to achieve a more uniform displacement distribution and therefore a uniform mass sensitivity, which guarantee the high accuracy and repeatable measurement for sensor detection in an air or a liquid environment. These results provide a fundamental reference for the design and optimization of the high quality sensor.