Simulation study of an inductively coupled plasma discharge with different copper coil designs and gas compositions

The physical characteristics for the study of two-dimensional inductively coupled plasma (ICP) discharge with different designs of copper coil and gas composition are presented in this paper. And this numerical model is a typical inductively coupled plasma discharge. Compared with former publications studying in ICP discharge, our simulation results indicate some new discoveries. First, the inductive coil gaps are arranged at different distances and their physical properties are studied in argon environment. The maximum electron density, electron temperature and macroscopic gas temperature are obtained at the best coil gap distance for discharge. Then, the inductive coils on the quartz tube without changing the coil gaps between the coils are placed in different positions and the discharge properties are also studied in argon environment. The maximum electron density, electron temperature and macroscopic gas temperature are obtained in the best position for discharge respectively. Finally, the physical characteristics of the ICP discharge in different gas compositions (other physical parameters were unchanged) are studied and the related important chemical reactions are also been described. It is concluded that the best discharge effect of argon gas is obtained under the same discharge conditions.