Processing and charge state engineering of MoOx
Source abstract
Abstract
The effects of wet chemical processing employed in device fabrication standards are studied on molybdenum oxide (MoOx) ultra-thin films. We have combined x-ray photoelectron spectroscopy (XPS), angle resolved XPS and x-ray reflectivity to gain insight into the changes in composition, structure and electronic states upon treatment of films with different initial stoichiometry prepared by reactive sputtering. Our results show significant reduction effects associated with the development of gap states in MoOx, as well as changes in the composition and structure of the films, systematically correlated with the initial oxidation state of Mo.
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Research context
OpenAlex topics: Semiconductor materials and devices · Transition Metal Oxide Nanomaterials · ZnO doping and properties
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Johannes Kepler University 1 Institut für Halbleiter-und-Festkörperphysik, , Altenbergerstr. 69, A-4040 Linz, Austria
Linz Institute of Technology - LIT 2 , Altenbergerstr. 69, A-4040 Linz, Austria
PLANSEE SE 3 Business Unit Coating, 6600, Reutte, Austria
Funding
North Atlantic Treaty Organization · Austrian Science Fund · Österreichische Forschungsförderungsgesellschaft · H2020 European Research Council
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