Characterization of CVD graphene permittivity and conductivity in micro-/millimeter wave frequency range

Yunqiu Wu; Yun Wu; Kai Kang; Yuanfu Chen; Yanrong Li; Tangsheng Chen; Yuehang Xu

doi:10.1063/1.4963140

journal article·2016-09-01Open access

Characterization of CVD graphene permittivity and conductivity in micro-/millimeter wave frequency range

Yunqiu Wu, Yun Wu, Kai Kang, Yuanfu Chen, Yanrong Li, Tangsheng Chen, Yuehang Xu

AIP Advances· Volume 6· Issue 9

Publisher page Open full text

Source abstract

Abstract

The permittivity and conductivity of chemical vapor deposited monolayer graphene are investigated up to 40 GHz. The characterization method is based on a coplanar waveguide transmission line structure that is fabricated on a multilayer substrate of Si/SiO2/graphene/Al2O3 from the bottom up. The effective relative permittivity of the coplanar waveguide transmission line is extracted using Thru-Reflect-Line calibration and scattering parameter measurements, and then the relative permittivity and corresponding conductivity of graphene are characterized using partial capacitance techniques. The results demonstrate that the conductivity and sheet resistance are remarkably frequency-dependent and that the complex relative permittivity is consistent with the Drude model.

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Research context

Nanomaterials

OpenAlex topics: Graphene research and applications · Photonic Crystals and Applications · Plasmonic and Surface Plasmon Research

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

University of Electronic Science and Technology of China 1 School of Electronic Engineering, , Chengdu 611731, People’s Republic of China

Nanjing Electronic Device Institute 2 Science and Technology on Monolithic Integrated Circuits and Modules Laboratory, , Nanjing 210016, People’s Republic of China

University of Electronic Science and Technology of China 3 State Key Laboratory of Electronic Thin Films and Integrated Devices, , Chengdu 610054, People’s Republic of China

Funding

National Natural Science Foundation of China · China Postdoctoral Science Foundation

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