Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range
Source abstract
Abstract
We demonstrate single-order operation of Lamellar Multilayer Gratings in the soft x-ray spectral range. The spectral resolution was found to be 3.8 times higher than from an unpatterned multilayer mirror, while there were no significant spectral sideband structures adjacent to the main Bragg peak. The measured spectral bandwidths and peak reflectivities were in good agreement with our theoretical calculations.
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Research context
OpenAlex topics: Optical Coatings and Gratings · Surface Roughness and Optical Measurements · Magneto-Optical Properties and Applications
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Affiliations
University of Twente 1 MESA + Institute for Nanotechnology, , 7522 NB, The Netherlands
Russian Academy of Sciences 2 Institute of Crystallography, , 119333, Moscow, Russia
PANalytical 3 , Almelo, 7602 EA, The Netherlands
NT&D Nanotechnology & Devices 4 , Aachen, 52062, Germany
nSI, FOM-Institute DIFFER 5 , formerly Rijnhuizen, Nieuwegein, 3430 BE, The Netherlands
References (11)
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