A novel linear piezoelectric actuator with two working principles of standing and traveling wave vibration mode
Abstract
Research context
OpenAlex topics: Piezoelectric Actuators and Control · Advanced MEMS and NEMS Technologies · Acoustic Wave Resonator Technologies
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Affiliations
Beihang University 1 School of Mechanical Engineering and Automation, , Beijing 100191, China
Tsinghua University 2 State Key Laboratory of New Ceramics and Fine Processing, School of Material Science and Engineering, , Beijing 100084, China
Paihe Science and Technology Holding Co., Ltd. 3 , Beijing 100083, China
Funding
Basic Scientific Research Program of China · National High Technology Research and Development Program of China · University Science and Technology Park and technology transfer center construction project · National Natural Science Foundation of China