journal article·2015-08-01Open access

Low contact resistance in epitaxial graphene devices for quantum metrology

Tom Yager, Arseniy Lartsev, Karin Cedergren, Rositsa Yakimova, Vishal Panchal, Olga Kazakova, Alexander Tzalenchuk, Kyung Ho Kim, Yung Woo Park, Samuel Lara-Avila, Sergey Kubatkin

AIP Advances· Volume 5· Issue 8

Abstract

We investigate Ti/Au contacts to monolayer epitaxial graphene on SiC (0001) for applications in quantum resistance metrology. Using three-terminal measurements in the quantum Hall regime we observed variations in contact resistances ranging from a minimal value of 0.6 Ω up to 11 kΩ. We identify a major source of high-resistance contacts to be due bilayer graphene interruptions to the quantum Hall current, whilst discarding the effects of interface cleanliness and contact geometry for our fabricated devices. Moreover, we experimentally demonstrate methods to improve the reproducibility of low resistance contacts (<10 Ω) suitable for high precision quantum resistance metrology.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Graphene research and applications · Quantum and electron transport phenomena · Advancements in Semiconductor Devices and Circuit Design

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Chalmers University of Technology Göteborg 1 Department of Microtechnology and Nanoscience, , S-412 96, Sweden

University of New South Wales 2 School of Physics, , Sydney, NSW-2052, Australia

Linköping University Linköping 3 Department of Physics, Chemistry and Biology (IFM), , S-581 83, Sweden

National Physical Laboratory 4 , Teddington, TW11 0LW, United Kingdom

University of London 5 Department of Physics, Royal Holloway, , Egham, TW20 0EX, United Kingdom

Seoul National University 6 Department of Physics and Astronomy, , Seoul 151-747, South Korea

References (38)

Show source-provided references
1. Nat. Nanotechnol. · 2010 · 5 · 18610.1038/nnano.2009.474 ↗
2. Metrologia · 2013 · 49 · 29410.1088/0026-1394/49/3/294 ↗
3. Phys. Rev. Lett. · 1980 · 45 · 49410.1103/PhysRevLett.45.494 ↗
4. IEEE Trans. Instrum. Meas. · 1990 · 39 · 210.1109/19.50404 ↗
5. Appl. Phys. Lett. · 2008 · 9310.1063/1.3043426 ↗
6. Science · 2007 · 315 · 137910.1126/science.1137201 ↗
7. Phys. Rev. Lett. · 2013 · 111 · 9660110.1103/PhysRevLett.111.096601 ↗
8. Appl. Phys. Lett. · 2013 · 103 · 17350910.1063/1.4826641 ↗
9. Europhys. Lett. · 1999 · 46 · 6210.1209/epl/i1999-00563-6 ↗
10. Metrologia · 2003 · 40 · 21710.1088/0026-1394/40/5/302 ↗
11. Phys. Rev. B · 1997 · 55 · 1312410.1103/PhysRevB.55.13124 ↗
12. Nat. Nanotechnol. · 2010 · 5 · 18610.1038/nnano.2009.474 ↗
13. Phys. Rev. B · 2010 · 82 · 12130510.1103/PhysRevB.82.121305 ↗
14. Zeitschrift Für Phys. B Condens. Matter · 1991 · 82 · 35110.1007/BF01357178 ↗
15. Nat. Nanotechnol. · 2011 · 6 · 17910.1038/nnano.2011.6 ↗
16. Appl. Phys. Lett. · 2011 · 99 · 03210710.1063/1.3614474 ↗
17. Appl. Phys. Lett. · 2011 · 99 · 07350610.1063/1.3627167 ↗
18. Appl. Phys. Lett. · 2010 · 96 · 01351210.1063/1.3290248 ↗
19. Appl. Phys. Lett. · 2010 · 97 · 14351410.1063/1.3491804 ↗
20. Appl. Phys. Lett. · 2011 · 98 · 05310310.1063/1.3549183 ↗
21. Phys. E Low-Dimensional Syst. Nanostructures · 2010 · 42 · 67710.1016/j.physe.2009.11.080 ↗
22. Phys. Rev. B · 2008 · 78 · 110.1103/PhysRevB.78.245403 ↗
23. Adv. Mater. · 2011 · 23 · 87810.1002/adma.201003993 ↗
24. Solid State Commun. · 2011 · 151 · 109410.1016/j.ssc.2011.05.020 ↗
25. Appl. Phys. Lett. · 2015 · 10610.1063/1.4907947 ↗
26. 2012
27. See supplementary material at http://dx.doi.org/10.1063/1.4928653 for Details of Sample Fabrication and Geometry and Ti Thickness Dependence of the Contact Resistance.
28. Carbon · 2015 · 87 · 40910.1016/j.carbon.2015.02.058 ↗
29. Phys. Rev. B · 2006 · 74 · 16140310.1103/PhysRevB.74.161403 ↗
30. Science · 2006 · 313 · 95110.1126/science.1130681 ↗
31. Phys. Rev. B · 2010 · 81 · 23540110.1103/PhysRevB.81.235401 ↗
32. Nano Lett. · 2012 · 12 · 174910.1021/nl203353f ↗
33. Nano Lett. · 2013 · 13 · 421710.1021/nl402347g ↗
34. Nano Lett. · 2014 · 14 · 336910.1021/nl5008757 ↗
35. Nano Lett. · 2011 · 11 · 232410.1021/nl200581g ↗
36. J. Appl. Phys. · 2012 · 112 · 5430710.1063/1.4748957 ↗
37. Sci. Rep. · 2013 · 3 · 259710.1038/srep02597 ↗
38. J. Appl. Phys. · 2012 · 11110.1063/1.3695451 ↗