Giant secondary grain growth in Cu films on sapphire
Source abstract
Abstract
Single crystal metal films on insulating substrates are attractive for microelectronics and other applications, but they are difficult to achieve on macroscopic length scales. The conventional approach to obtaining such films is epitaxial growth at high temperature using slow deposition in ultrahigh vacuum conditions. Here we describe a different approach that is both simpler to implement and produces superior results: sputter deposition at modest temperatures followed by annealing to induce secondary grain growth. We show that polycrystalline as-deposited Cu on α-Al2O3(0001) can be transformed into Cu(111) with centimeter-sized grains. Employing optical microscopy, x-ray diffraction, and electron backscatter diffraction to characterize the films before and after annealing, we find a particular as-deposited grain structure that promotes the growth of giant grains upon annealing. To demonstrate one potential application of such films, we grow graphene by chemical vapor deposition on wafers of annealed Cu and obtain epitaxial graphene grains of 0.2 mm diameter.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Copper Interconnects and Reliability · Semiconductor materials and devices · Surface and Thin Film Phenomena
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
National Institute of Standards and Technology , Boulder, CO 80305, USA
References (29)
Show source-provided references
1. 2003
2. A historical review of epitaxy
3. Perpendicular recording media for hard disk drives10.1063/1.2750414 ↗
4. Mesostructured thin films as electrocatalysts with tunable composition and surface morphology10.1038/nmat3457 ↗
5. Electromigration in ULSI interconnects10.1016/j.mser.2007.04.002 ↗
6. Epitaxial grain growth in thin metal films10.1063/1.344969 ↗
7. Transfer of CVD-grown monolayer graphene onto arbitrary substrates10.1021/nn201207c ↗
8. Large physisorption strain in chemical vapor deposition of graphene on copper substrates10.1021/nl300397v ↗
9. Origin of the mosaicity in graphene grown on Cu(111)10.1103/PhysRevB.84.155425 ↗
10. Graphene islands on Cu foils: The interplay between shape, orientation, and defects10.1021/nl102788f ↗
11. Obtaining different orientation relationships for Cu films grown on (0001) α-Al2O3 substrates by magnetron sputtering
12. Bonding at copper–alumina interfaces established by different surface treatments: a critical review10.1007/s10853-006-0073-0 ↗
13. Epitaxy and bonding of Cu films on oxygen-terminated α-Al2O3(0001) surfaces10.1016/j.actamat.2006.02.011 ↗
14. Control of bonding and epitaxy at copper/sapphire interface10.1063/1.2794025 ↗
15. Orientation relationships of copper crystals on c-plane sapphire10.1016/j.actamat.2011.05.008 ↗
16. Structural evolution during processing of polycrystalline thin films10.1146/annurev.matsci.30.1.159 ↗
17. Secondary grain growth in thin films of semiconductors: Theoretical aspects10.1063/1.336194 ↗
18. Formation of giant-grain copper interconnects by a low-energy ion bombardment process for high-speed ULSIs10.1016/0254-0584(95)01512-4 ↗
19. Increasing the mean grain size in copper films and features10.1557/JMR.2008.0080 ↗
20. Phase field modeling of grain growth in thin films on rigid substrates10.1002/pssb.201147495 ↗
21. Solid-state dewetting of thin films10.1146/annurev-matsci-070511-155048 ↗
22. The thermodynamics and kinetics of film agglomeration10.1007/BF03221433 ↗
23. Theory of thermal grooving10.1063/1.1722742 ↗
24. See supplementary material at http://dx.doi.org/10.1063/1.4817829 for additional figures.10.1063/1.4817829 ↗
25. Epitaxial (111) films of Cu, Ni, and CuxNiy on α - Al2O3 (0001) for graphene growth by chemical vapor deposition10.1063/1.4754013 ↗
26. High quality, transferrable graphene grown on single crystal Cu(111) thin films on basal-plane sapphire10.1063/1.3569143 ↗
27. Direct evidence of advantage of Cu(111) for graphene synthesis by using Raman mapping and electron backscatter diffraction10.1016/j.matlet.2011.06.047 ↗
28. Epitaxial growth of large-area single-layer graphene over Cu(111)/sapphire by atmospheric pressure CVD10.1016/j.carbon.2011.08.002 ↗
29. Structure at abrupt copper–alumina interfaces: An ab initio study10.1016/j.actamat.2005.07.036 ↗