Fabrication of micro lens array on diamond surface

Fabrication of microlenses on a diamond surface is an important way to enhance the performance of the embedded nitrogen vacancy (NV) center which is a promising single light source for quantum communication and quantum-based detection. In this work, lenses with a micrometer diameter were fabricated on a diamond surface by using the inductively coupled plasma (ICP) etching technique with a mask of polystyrene (PS) balls. First, 1 µm diameter PS balls were dispersed on the surface of deionized water. Then, the balls were transferred onto a diamond surface. Third, the sample was treated using the ICP technique to form microlenses. By increasing ICP etching time, the surface of fabricated microlenses became smoother. The simulation results demonstrate that the microlenses can greatly improve the photon collection efficiency of the embedded NV center and focus more excitation light to the NV center than bulk diamond.