journal article·2018-03-01Open access

Influence factors and temperature reliability of ohmic contact on AlGaN/GaN HEMTs

Liang Song, Kai Fu, Jie Zhao, Guohao Yu, Ronghui Hao, Xiaodong Zhang, Fu Chen, Yaming Fan, Yong Cai, Baoshun Zhang

AIP Advances· Volume 8· Issue 3

Abstract

In this paper, we have studied the performance of Ti/Al/Ni/Au ohmic contact with different Al and Au thicknesses and pretreatments. The temperature dependence of contact resistances (Rc) was investigated and it shows that there are different optimal annealing temperatures with different metal thicknesses and pretreatments. The optimal annealing temperature is affected by Al and Au thickness and AlGaN thickness. The etched AlGaN barrier is useful to achieve good ohmic contact (0.24 Ω·mm) with a low annealing temperature. Only the contact resistances of the samples with 130 nm Al layer kept stable and the contact resistances of the samples with 100nm and 160 nm Al layers increased with the measurement temperatures. The contact resistances showed a similar increase and then keep stable trend for all the samples in the long-term 400 °C aging process. The ohmic metal of 20/130/50/50 nm Ti/Al/Ni/Au with ICP etching is the superior candidate considering the contact resistance and reliability.
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Research context

OpenAlex topics: GaN-based semiconductor devices and materials · Semiconductor materials and devices · Metal and Thin Film Mechanics

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Affiliations

1School of Nano Technology and Nano Bionics, University of Science and Technology of China, Suzhou 215123, People’s Republic of China

2Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, CAS, Suzhou 215123, People’s Republic of China

3Key Laboratory of Opto-Electronics Technology (Beijing University Technology), Ministry of Education, Beijing University of Technology, Beijing 100124, People’s Republic of China

4School of Materials Science and Engineering, Nanjing University of Science and Technology, Xiao Ling Wei 200, Nanjing 210094, People’s Republic of China

5Suzhou Powerhouse Electronics Co., Ltd, Suzhou 215123, People’s Republic of China

Funding

Key Research and Development Program of Jiangsu Province · National Key Research and Development Program of China · National Key Scientific Instrument and Equipment Development Projects of China · National Natural Science Foundation of China

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