Effects of aspect ratio on the mode couplings of thin-film bulk acoustic wave resonators
Source abstract
Abstract
We studied mode couplings in thin film bulk acoustic wave resonators of a piezoelectric film on a dielectric layer operating with the fundamental thickness-extensional mode. A system of plate equations derived in our previous paper was used which includes the couplings to the unwanted in-plane extension, flexure, fundamental and second-order thickness shear modes. It was shown that the couplings depend strongly on the plate length/thickness ratio. For a relatively clean operating mode with weak couplings to unwanted modes, a series of discrete values of the plate length/thickness ratio should be avoided and these values were determined in the present paper. The results can be of great significance to the design and optimization of film bulk acoustic wave resonators.
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Research context
OpenAlex topics: Acoustic Wave Resonator Technologies · Mechanical and Optical Resonators · Ferroelectric and Piezoelectric Materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Nanjing University of Aeronautics and Astronautics 1 State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, , Nanjing 210016, China
The University of Nebraska-Lincoln 2 Department of Mechanical and Materials Engineering, , Lincoln, Nebraska 68588-0526, USA
Funding
National Natural Science Foundation of China · Natural Science Foundation of Jiangsu Province · Program for New Century Excellent Talents in University
References (35)
Show source-provided references
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