Modified Stoney formula for determining stress within thin films on large-deformation isotropic circular plates
Source abstract
Abstract
The Stoney formula is widely used to obtain residual stress in films on isotropic circular plates. However, in the case of large deformations, this formula produces significant errors because of the assumption of small deformations in its derivation. In this study, a modified Stoney formula that extends its scope of application to the nonlinear domain is proposed. A one-phase exponential decay function with a single coefficient p is used to relate the curvature of the substrate to the stress in the film. The coefficient p can be expressed as a function of the thickness, the diameter, Young’s modulus, and Poisson’s ratio of the circular plate. A linear fitting technique is applied to ascertain the relationship between the coefficient p and the aforementioned parameters. The modified Stoney formula is simple, yet accurate, and can be used to calculate the residual stress in the film directly from the measured curvature of isotropic circular plates with various dimensions and materials.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Numerical methods in engineering · Mechanical stress and fatigue analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Mechanical Engineering, Hefei University of Technology 1 , Hefei 230009, People’s Republic of China
Anhui Engineering Laboratory of Intelligent CNC Technology and Equipment 2 , Hefei 230009, People’s Republic of China
Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University 3 , Suzhou 215021, People’s Republic of China
Funding
National Natural Science Foundation of China
References (23)
Show source-provided references
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