Fabrication and characterization of SnO2 nanorods for room temperature gas sensors

Highly sensitive large-scale tin oxide (SnO2) nanostructures were grown on a glass substrate by thermal evaporation of a mixture of anhydrous tin (II) chloride (SnCl2) and zinc chloride (ZnCl2) powders at 550°C in air. We demonstrate a single cell vapor deposition system to precisely control nanostructural morphology of SnO2 by changing the weight ratio of SnCl2 and ZnCl2 and growth temperature. The morphology and structural property of as-grown nanostructures were characterized using scanning electron microscopy (SEM) and X-ray diffraction (XRD). The SEM images revealed that the SnO2 nanostructures with different densities, sizes, and shapes can be achieved by adjusting the weight ratio of SnCl2 and ZnCl2. A thin film gas sensor based on SnO2 nanostructures with diameter ∼20 nm and length ∼100 nm showed ∼85% sensitivity and 53 seconds of response time, whereas the nanorods with diameter ∼100 nm and length ∼ 1μm showed ∼50% sensitivity with 198 seconds response time. The nanostructured material with small size and shape showed better sensitivity on sensing at room temperature compared to previously reported SnO2 based sensors.