The thin film bulk acoustic wave resonator based on single-crystalline 43○Y-cut lithium niobate thin films
Source abstract
Abstract
43°Y-cut lithium niobate (LiNbO3, LN) single-crystalline thin films, which are integrated with two types of Bragg reflectors of W/SiO2 and Mo/SiO2, respectively, are fabricated by means of the crystal-ion-slicing technique. Crack-free LN thin films are obtained when the Mo/SiO2 reflector is adopted, while crumples take place when the LN thin film is combined with W/SiO2. Moreover, solidly-mounted-type thin film bulk acoustic wave resonators (LN-SMRs) based on the single-crystalline LN film and Bragg reflector layers of Mo/SiO2 are prepared and characterized. The results indicate that the LN thin film combined with the Mo/SiO2 reflector has good thin film quality, and keff2 of the LN-SMR reaches 20%.
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Research context
OpenAlex topics: Acoustic Wave Resonator Technologies · Ferroelectric and Piezoelectric Materials · Photorefractive and Nonlinear Optics
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Affiliations
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China 1 , Chengdu 611731, China
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences 2 , Shanghai 201800, China
School of Electronic Science and Engineering, University of Electronic Science and Technology of China 3 , Chengdu 611731, China
Funding
National Key Research and Development Plan · National Nature Science Foundation of China
References (20)
Show source-provided references
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