Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range
Source abstract
Abstract
This paper presents a method for designing and fabricating a Love wave resonator utilizing the phononic crystal (PC) as the reflectors. The PCs were formed by depositing 2D, periodically etched silica film on a quartz substrate. We analyzed the PC structure, and within its partial bandgap we designed a one-port resonator that contained a set of inter-digital transducer (IDT) inside the resonant cavity bonded by two PC arrays. With sub-micrometer structures, the resonator was designed to operate at 1.25 GHz. The device was fabricated by employing the microelectromechanical system (MEMS) fabrication technology and the resonant performance was evaluated.
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Research context
OpenAlex topics: Acoustic Wave Phenomena Research · Speech and Audio Processing · Microwave Engineering and Waveguides
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Affiliations
Inst. of Applied Mechanics, National Taiwan Univ. 1 , Taipei, Taiwan
WPI-AIMR, Tohoku Univ. 2 , Sendai, Japan
Dept. of Mechanical Engineering, Tohoku Univ. 3 , Sendai, Japan
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