Preparation and thermal volatility characteristics of In2O3/ITO thin film thermocouple by RF magnetron sputtering
Source abstract
Abstract
In2O3/ITO thin film thermocouples for high temperature measurement (up to 1250 °C) were prepared by radio frequency magnetron sputtering method with different annealing temperatures from 1100 °C to 1250 °C. The changes with microstructure characteristics and the thickness of the thin film thermocouples were investigated as a function of sintering temperature in the range of 1100 °C -1250 °C and annealing time from 2 hrs to 10 hrs at 1200 °C by using XRD and SEM techniques. The thermoelectric output was measured and its results indicated that this thermocouple had a steady and constant voltage output from room temperature to 1247 oC. The thermoelectric voltage and Seebeck coefficient of In2O3/ITO thermocouples measured at 1247 oC were 166.7 mV and 136.3 μV/oC, respectively.
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Research context
OpenAlex topics: Advanced Sensor Technologies Research · Scientific Measurement and Uncertainty Evaluation · Calibration and Measurement Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, Xi’an Jiaotong University 1 , Xi’an 710049, China
Department of Electronic Engineering, Xi’an University of Technology 3 , Xi’an 710048, China
International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University 2 , Xi’an 710049, China
Department of Chemistry and 4D LABS, Simon Fraser University 4 , Burnaby, BC V5A 1S6, Canada
References (21)
Show source-provided references
1. Preparation of W-Ta thin-film thermocouple on diamond anvil cell for in-situ temperature measurement under high pressure10.1063/1.3579515 ↗
2. Thin film temperature sensors deposited by radio frequency cathodic sputtering10.1116/1.574265 ↗
3. Design, fabrication and characterization of metal embedded thin film thermocouples with various film thicknesses and junction sizes10.1088/0960-1317/16/5/004 ↗
4. Chemical vapor deposition of alpha aluminum oxide for high-temperature aerospace sensors10.1116/1.582401 ↗
5. A review of exhaust gas temperature sensing techniques for modern turbine engine controls
6. Stability and microstructure of indium tin oxynitride thin films10.1111/j.1551-2916.2011.04845.x ↗
7. A fast response thermocouple for internal combustion engine surface temperature measurements10.1016/j.expthermflusci.2009.10.008 ↗
8. Investigations on the structure, composition and performance of nanocrystalline thin film thermocouples deposited using anodic vacuum arc10.1016/j.tsf.2010.05.084 ↗
9. Conjugate heat transfer simulations of a thermocouple sensor in a low temperature nitrogen gas ambient10.1016/j.ijheatmasstransfer.2013.11.033 ↗
10. Cell integrated multi-junction thermocouple array for solid oxide fuel cell temperature sensing: Nt+1 architecture10.1016/j.jpowsour.2016.03.002 ↗
11. High temperature materials for thin-film thermocouples on silicon wafers10.1016/s0040-6090(00)01346-8 ↗
12. Thin film platinum-palladium thermocouples for gas turbine engine applications10.1016/j.tsf.2013.05.076 ↗
13. High temperature thin film Pt-Ir thermocouple with fast time response10.1063/1.1139649 ↗
14. Fabrication and calibration of Pt-10%Rh/Pt thin film thermocouples10.1016/j.measurement.2013.11.018 ↗
15. Ceramic thin film thermocouples for SiC-based ceramic matrix composites10.1016/j.tsf.2012.04.034 ↗
16. Thin-film thermocouple based on the system In2O3-SnO210.1111/j.1551-2916.2010.04136.x ↗
17. Preparation and characterization of ceramic thin film thermocouples10.1016/j.tsf.2010.05.102 ↗
18. High-temperature vaporization behavior of oxides II. Oxides of Be, Mg, Ca, Sr, Ba, B, Al, Ga, In, Tl, Si, Ge, Sn, Pb, Zn, Cd, and Hg10.1063/1.555799 ↗
19. The high temperature behavior of In2O310.1016/0022-4596(75)90118-8 ↗
20. Solid state sintering of nano-crystalline indium tin oxide10.1016/j.jeurceramsoc.2012.09.023 ↗
21. Metallic and ceramic thin film thermocouples for gas turbine engines10.3390/s131115324 ↗