Enhanced photon-extraction efficiency from InGaAs/GaAs quantum dots in deterministic photonic structures at 1.3 μm fabricated by in-situ electron-beam lithography
Source abstract
Abstract
The main challenge in the development of non-classical light sources remains their brightness that limits the data transmission and processing rates as well as the realization of practical devices operating in the telecommunication range. To overcome this issue, we propose to utilize universal and flexible in-situ electron-beam lithography and hereby, we demonstrate a successful technology transfer to telecom wavelengths. As an example, we fabricate and characterize especially designed photonic structures with strain-engineered single InGaAs/GaAs quantum dots that are deterministically integrated into disc-shaped mesas. Utilizing this approach, an extraction efficiency into free-space (within a numerical aperture of 0.4) of (10±2) % has been experimentally obtained in the 1.3 μm wavelength range in agreement with finite-element method calculations. High-purity single-photon emission with g(2)(0)<0.01 from such deterministic structure has been demonstrated under quasi-resonant excitation.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Near-Field Optical Microscopy · Semiconductor Quantum Structures and Devices · Photonic Crystals and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Institute of Solid State Physics, Technical University of Berlin 1 , Hardenbergstraße 36, D-10623 Berlin, Germany
Laboratory for Optical Spectroscopy of Nanostructures, Department of Experimental Physics, Faculty of Fundamental Problems of Technology, Wrocław University of Science and Technology 2 , Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland
JCMwave GmbH 3 , Bolivarallee 22, D-14050 Berlin, Germany
Zuse Institute Berlin 4 , Takustraße 7, D-14195 Berlin, Germany
Funding
German Research Foundation · National Center for Research and Development
References (59)
Show source-provided references
1. Solid-state single photon sources: Light collection strategies10.1140/epjd/e20020024 ↗
2. Inhibition, enhancement, and control of spontaneous emission in photonic nanowires10.1103/physrevlett.106.103601 ↗
3. A fiber-coupled quantum-dot on a photonic tip10.1063/1.4939264 ↗
4. Bright single-photon source at 1.3 μm based on InAs bilayer quantum dot in micropillar10.1186/s11671-017-2153-2 ↗
5. A highly efficient single-photon source based on a quantum dot in a photonic nanowire10.1038/nphoton.2009.287x ↗
6. A circular dielectric grating for vertical extraction of single quantum dot emission10.1063/1.3615051 ↗
7. Vertical microcavities with high Q and strong lateral mode confinement10.1103/physrevb.87.161116 ↗
8. On-demand single photons with high extraction efficiency and near-unity indistinguishability from a resonantly driven quantum dot in a micropillar10.1103/physrevlett.116.020401 ↗
9. Controlled light-matter coupling for a single quantum dot embedded in a pillar microcavity using far-field optical lithography10.1103/physrevlett.101.267404 ↗
10. Cavity-enhanced radiative emission rate in a single-photon-emitting diode operating at 0.5 GHz10.1088/1367-2630/10/4/043035 ↗
11. Single quantum dot with microlens and 3d-printed micro-objective as integrated bright single-photon source10.1021/acsphotonics.7b00253 ↗
12. Solid-state single photon sources: The nanowire antenna10.1364/oe.17.002095 ↗
13. Strong Purcell effect for InAs quantum boxes in high-Q wet-etched microdisks10.1016/s1386-9477(99)00400-2 ↗
14. Nat. Commun. · 2013 · 4 · 142510.1038/ncomms2434 ↗
15. Toward optical quantum information processing with quantum dots coupled to microstructures10.1364/josab.33.00c160 ↗
16. Enhanced spontaneous emission by quantum boxes in a monolithic optical microcavity10.1103/physrevlett.81.1110 ↗
17. Two-photon direct laser writing of ultracompact multi-lens objectives10.1038/nphoton.2016.121 ↗
18. Observation of cavity-enhanced single-atom spontaneous emission10.1103/physrevlett.50.1903 ↗
19. In situ electron-beam lithography of deterministic single-quantum-dot mesa-structures using low-temperature cathodoluminescence spectroscopy10.1063/1.4812343 ↗
20. Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography10.1038/ncomms8662 ↗
21. Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses10.1063/1.3519847 ↗
22. Electrically driven quantum dot-micropillar single photon source with 34% overall efficiency10.1063/1.3284514 ↗
23. Advanced in-situ electron-beam lithography for deterministic nanophotonic device processing10.1063/1.4926995 ↗
24. CSAR62 as negative-tone resist for high-contrast e-beam lithography at temperatures between 4 K and room temperature10.1116/1.4965883 ↗
25. Micropillars with a controlled number of site-controlled quantum dots10.1063/1.5017692 ↗
26. Two-photon interference from a bright single-photon source at telecom wavelengths10.1364/optica.3.000577 ↗
27. Cavity-quantum electrodynamics using a single InAs quantum dot in a microdisk structure10.1063/1.1379987 ↗
28. Accurate alignment of a photonic crystal nanocavity with an embedded quantum dot based on optical microscopic photoluminescence imaging10.1063/1.4773882 ↗
29. Monolithic integration of quantum dot containing microdisk microcavities coupled to air-suspended waveguides10.1063/1.3078522 ↗
30. Enhanced photon extraction from a quantum dot induced by a silver microcolumnar photon reflector10.7567/apex.6.062801 ↗
31. Droplet etching of deep nanoholes for filling with self-aligned complex quantum structures10.1186/s11671-016-1495-5 ↗
32. Indistinguishable single photons from a single-quantum dot in a two-dimensional photonic crystal cavity10.1063/1.2103397 ↗
33. Bright single photon source based on self-aligned quantum dot-cavity systems10.1364/oe.22.008136 ↗
34. 2003
35. Single-mode solid-state single photon source based on isolated quantum dots in pillar microcavities10.1063/1.1415346 ↗
36. Catalyst metal selection for synthesis of inorganic nanowires10.1002/adma.200401717 ↗
37. Fabrication and tuning of plasmonic optical nanoantennas around droplet epitaxy quantum dots by cathodoluminescence10.1063/1.4809831 ↗
38. Polarization-entangled photons from an InGaAs-based quantum dot emitting in the telecom C-band10.1063/1.4994145 ↗
39. Metal-organic vapor-phase epitaxy-grown ultra-low density InGaAs/GaAs quantum dots exhibiting cascaded single-photon emission at 1.3 μm10.1063/1.4916349 ↗
40. Positioning plasmonic nanostructures on single quantum emitters10.1002/pssb.201100788 ↗
41. Eleven nanometer alignment precision of a plasmonic nanoantenna with a self-assembled gaas quantum dot10.1021/nl403730q ↗
42. Monolithic integration of a quantum emitter with a compact on-chip beam-splitter10.1063/1.4883374 ↗
43. Nature Commun. · 2012 · 3 · 73710.1038/ncomms1746 ↗
44. Nanoscale optical positioning of single quantum dots for bright and pure single-photon emission10.1038/ncomms8833 ↗
45. Combining in-situ lithography with 3D printed solid immersion lenses for single quantum dot spectroscopy10.1038/srep39916 ↗
46. Single-color, in situ photolithography marking of individual CdTe/ZnTe quantum dots containing a single Mn2+ ion10.1063/1.4905306 ↗
47. Single-photon emission at a rate of 143 MHz from a deterministic quantum-dot microlens triggered by a mode-locked vertical-external-cavity surface-emitting laser10.1063/1.4927429 ↗
48. In(Ga)As/GaAs site-controlled quantum dots with tailored morphology and high optical quality10.1002/pssa.201228373 ↗
49. Numerical optimization of the extraction efficiency of a quantum-dot based single-photon emitter into a single-mode fiber10.1364/oe.26.008479 ↗
50. Near-optimal single-photon sources in the solid state10.1038/nphoton.2016.23 ↗
51. High-frequency single-photon source with polarization control10.1038/nphoton.2007.227 ↗
52. Lateral positioning of InGaAs quantum dots using a buried stressor10.1063/1.3691251 ↗
53. Highly indistinguishable on-demand resonance fluorescence photons from a deterministic quantum dot micropillar device with 74% extraction efficiency10.1364/oe.24.008539 ↗
54. Single-photon generator for optical telecommunication wavelength10.1088/1742-6596/38/1/034 ↗
55. Restoration of photon indistinguishability in the emission of a semiconductor quantum dot10.1103/physrevb.72.041303 ↗
56. Photonic band-gap structures10.1364/josab.10.000283 ↗
57. Deterministic integration of single photon sources in silicon based photonic circuits10.1021/acs.nanolett.5b04709 ↗
58. Time-resolved and antibunching experiments on single quantum dots at 1300 nm10.1063/1.2190466 ↗
59. Photonic-wire laser10.1103/physrevlett.75.2678 ↗