A review of subsurface damage detection methods for optical components

Subsurface damage (SSD) induced during the processing of optical components, which are key parts of large optical systems, can deteriorate optical system performance or damage the complete system. To eliminate the SSD of optical components in subsequent processing, it must be accurately detected. This paper presents a review of the principle, characteristics, research status, and development trends of SSD detection methods for optical components. This review finds that destructive detection methods can damage the components and cannot detect SSD online, but they are reliable and accurate and characterized by facile principles, easy implementation, and inexpensive equipment. Consequently, such methods are widely used for the validation of non-destructive methods and quality control of components in industrial production. In comparison, non-destructive detection methods can detect SSD online without destroying the components, shorten the detection cycle, increase the overall production efficiency, and decrease the cost. Therefore, non-destructive detection methods have promising development prospects.