DataVXAIP AdvancesPaper
journal article·2016-06-01Open access

Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications

E. Serra, M. Bawaj, A. Borrielli, G. Di Giuseppe, S. Forte, N. Kralj, N. Malossi, L. Marconi, F. Marin, F. Marino, B. Morana, R. Natali, G. Pandraud, A. Pontin, G. A. Prodi, M. Rossi, P. M. Sarro, D. Vitali, M. Bonaldi

AIP Advances· Volume 6· Issue 6
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Source abstract

Abstract

In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiNx membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiNx membranes were fabricated and used as optomechanical resonators in a Michelson interferometer, where Q values up to 1.3 × 106 were measured at cryogenic temperatures, and in a Fabry-Pérot cavity, where an optical finesse up to 50000 has been observed.
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Research context

OpenAlex topics: Mechanical and Optical Resonators · Force Microscopy Techniques and Applications · Advanced MEMS and NEMS Technologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Istituto Nazionale di Fisica Nucleare 1 , TIFPA, 38123 Povo (TN), Italy

Delft University of Technology 2 , Else Kooi Laboratory, 2628 Delft, The Netherlands

Università di Camerino 3 Physics Division, School of Science and Technology, , 62032 Camerino (MC), Italy

Sezione di Perugia 4 INFN, , 06123, Perugia, Italy

Institute of Materials for Electronics and Magnetism 5 , Nanoscience-Trento-FBK Division, 38123 Povo (TN), Italy

Università di Trento 6 Dipartimento di Fisica, , 38123 Povo (TN), Italy

Università di Firenze 7 Dipartimento di Fisica e Astronomia, , Via Sansone 1, 50019 Sesto Fiorentino (FI), Italy

Sezione di Firenze 8 INFN, , Via Sansone 1, 50019 Sesto Fiorentino (FI), Italy

LENS 9 , Via Carrara 1, 50019 Sesto Fiorentino (FI), Italy

CNR-INO 10 , L.go Enrico Fermi 6, 50125 Firenze, Italy

Funding

Ministero dell'Istruzione, dell'Università e della Ricerca · Istituto Nazionale di Fisica Nucleare

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