Controlled formation of anatase and rutile TiO2 thin films by reactive magnetron sputtering
Source abstract
Abstract
We discuss the formation of TiO2 thin films via DC reactive magnetron sputtering. The oxygen concentration during sputtering proved to be a crucial parameter with respect to the final film structure and properties. The initial deposition provided amorphous films that crystallise upon annealing to anatase or rutile, depending on the initial sputtering conditions. Substoichiometric films (TiOx<2), obtained by sputtering at relatively low oxygen concentration, formed rutile upon annealing in air, whereas stoichiometric films formed anatase. This route therefore presents a formation route for rutile films via lower (<500 °C) temperature pathways. The dynamics of the annealing process were followed by in situ ellipsometry, showing the optical properties transformation. The final crystal structures were identified by XRD. The anatase film obtained by this deposition method displayed high carriers mobility as measured by time-resolved microwave conductance. This also confirms the high photocatalytic activity of the anatase films.
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Research context
OpenAlex topics: TiO2 Photocatalysis and Solar Cells · Advanced Photocatalysis Techniques · Copper-based nanomaterials and applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
University of Twente 1 Soft matter, Fluidics, and Interfaces, Mesa+ institute for nanotechnology, , 7500 AE Enschede, The
Netherlands 1 Soft matter, Fluidics, and Interfaces, Mesa+ institute for nanotechnology, , 7500 AE Enschede, The
University of Twente 2 Inorganic Membranes, Mesa+ institute for nanotechnology, , 7500 AE Enschede,
The Netherlands 2 Inorganic Membranes, Mesa+ institute for nanotechnology, , 7500 AE Enschede,
Delft University of Technology 3 Opto-electronic Materials Section, Department of Chemical Engineering, , 2628 BL Delft, The
Netherlands 3 Opto-electronic Materials Section, Department of Chemical Engineering, , 2628 BL Delft, The
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