Laser micro-fabrication of concave, low-roughness features in silica
Source abstract
Abstract
We describe a micro-fabrication method to create concave features with ultra-low roughness in silica, either on optical fibers or on flat substrates. The machining uses a single CO2 laser pulse train. Parameters are chosen such that evaporation removes material while a low-viscosity melt layer produces excellent surface quality. A surface roughness σ ∼ 0.2 nm is regularly obtained. The concave depressions are near-spherical close to the center with radii of curvature between 20 and 2000 μm. The method allows fabrication of low-scatter micro-optical devices such as mirror substrates for high-finesse cavities or negative lenses on fiber tips, extending the range of micro-optical components.
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Research context
OpenAlex topics: Photonic and Optical Devices · Photonic Crystals and Applications · Nanofabrication and Lithography Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Max-Planck-Institut für Quantenoptik and Fakultät für Physik der Ludwig-Maximilians Universität 1 , Schellingstraße 4, D 80799 München, Germany
Laboratoire Kastler Brossel 2 , ENS/UPMC-Paris 6/CNRS, 24 rue Lhomond, F-75005 Paris, France
Heriot-Watt University 3 School of Engineering and Physical Sciences, , Edinburgh EH14 4AS, UK
University of Basel 4 Department of Physics, , Klingelbergstrasse 82, CH-4056 Basel, Switzerland
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