A High‐Resolution Self‐Powered Angular Displacement Sensor Based on Triboelectric Nanogenerator With Time‐Grating

ABSTRACT In modern manufacturing and engineering, angular displacement sensors are crucial for motion control and feedback systems in Electromechanical equipment. Traditional sensors like resolvers, capacitive, and photoelectric encoders, though high in precision and resolution, face limitations in size, weight, and power supply. In this paper, we report a self‐powered angular displacement sensor (SPADS) based on the triboelectric nanogenerator principle and time‐grating technology. SPADS features a compact structure composed of a stator and a rotor. The rotor is equipped with a single row of dual‐sinusoidal copper electrodes. At the same time, the stator is made of annular fan‐shaped copper electrodes covered with a layer of PTFE material. The electrical signals generated by the friction between the stator and different rotor electrodes are modulated with high‐frequency excitation pulses to obtain signals with phase containing angular displacement information. High‐frequency time pulses serve as the measurement standard to realize the phase detection, and the angular displacement is measured by counting the time pulses. Through simulation and experimental tests, the sensor can achieve a theoretical resolution of 5.18“ and a measurement accuracy within the range of ±716”. This paper has its significance for reference to miniaturized, efficient, and reliable sensors in the field of intelligent equipment.