Microsphere‐Modulated Sensing‐in‐Energy Supercapacitor With Self‐Filtering Ultra‐Large Signal Under High‐ g Shocks

ABSTRACT Driven by the “More than Moore” law, the miniaturization and multi‐functional integration of micro‐energy units and micro‐sensors are crucial for next‐generation compact microsystems. To address severe signal oscillation and unstable energy supply under continuous extreme overload (>10 000 g ), this study proposes a Sensing‐in‐Energy (SiE) microdevice featuring a MEMS movable inertial structure built into a supercapacitor electrolyte cavity. This architecture leverages high‐ g shock‐driven transient contact between embedded metal microspheres and the electrode to modulate the soft short‐circuit sensing effect. By utilizing electrolyte damping for signal self‐filtering, the device achieves a high‐range (30 000 g ) and large‐amplitude (450 mV) output with weak oscillation (signal adhesion coefficient reduced by 90.84%). To ensure precise development of the SiE microdevice, a multi‐physics‐driven design method coupling transient fluid‐structure interaction (FSI) and micro‐nano scale rough electrical contact theory was established. This reveals the dynamic mapping laws from mechanical excitation to fluid‐structure coupling interface response and electrochemical output, reducing simulation‐experiment error to within 8%. Furthermore, a high‐precision microsphere embedding process was developed to minimize manufacturing randomness, maintaining signal repeatability error below 10%. This work offers a new paradigm for designing SiE microdevices for extreme environments and lays a technical foundation for the development of future high‐performance heterogeneous microsystems.