journal article·2025-03Open access

3D Femtosecond Laser Beam Deflection for High‐Precision Fabrication and Modulation of Individual Voxelated PCM Meta‐Atoms (Adv. Sci. 9/2025)

Weina Han, Donghui Wei, Biye Peng, Jianhui Jiang, Jintao Tong, Zhehao Xu, Xueyan Zou, Jie Hu, Qian Cheng, Lan Jiang

Advanced Science· Volume 12· Issue 9

Abstract

3D Femtosecond Laser Beam DeFLection In article number 2413316, Lan Jiang and co-workers present a PCM-only metasurface constructed entirely of phase-change material voxels. The three-dimensional beam deflection method combines femtosecond laser phase modulation with 200 nm processing precision, enabling atomic-level control of PCM meta-atoms. This breakthrough technique advances highprecision metasurface fabrication and dynamic optical modulation capabilities.
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Research context

OpenAlex topics: Laser Material Processing Techniques

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