X‐Ray Optics: 3D Nanofabrication of High‐Resolution Multilayer Fresnel Zone Plates (Adv. Sci. 9/2018)
Source abstract
Abstract
In article 1800346, Umut Tunca Sanli, Kahraman Keskinbora, and co-workers fabricate multilayer Fresnel zone plate (ML-FZP) type X-ray lenses on optical fibers by depositing several hundred alternating layers of oxide super-structures. 15 nm wide structures of a test object are resolved using the built X-ray lenses. Moreover, a plasma focused ion beam is used for preparing micro-pillar arrays with precise tapering angles enabling ML-FZPs with zones precisely tilted to the Bragg angle.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced X-ray Imaging Techniques
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Affiliations
Modern Magnetic Systems Max Planck Institute for Intelligent Systems Stuttgart 70569 Germany
Thermo Fisher Scientific 5651 GG Eindhoven The Netherlands
Stuttgart Center for Electron Microscopy Max Planck Institute for Solid State Research Stuttgart 70569 Germany
References
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