journal article·2015-07Open access

Nanolithography: Selectable Nanopattern Arrays for Nanolithographic Imprint and Etch‐Mask Applications (Adv. Sci. 7/2015)

Hyeon‐Ho Jeong, Andrew G. Mark, Tung‐Chun Lee, Kwanghyo Son, Wenwen Chen, Mariana Alarcón‐Correa, Insook Kim, Gisela Schütz, Peer Fischer

Advanced Science· Volume 2· Issue 7

Abstract

A parallel nanolithographic patterning method is presented by P. Fischer and co-workers in article number 1500016 that can be used to obtain arrays of multifunctional nanoparticles. These patterns can simply be converted into a variety of secondary nanopatterns that are useful for nanolithographic imprint, plasmonic, and etch-mask applications. Image by Alejandro Posada Boada.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Nanofabrication and Lithography Techniques · Advancements in Photolithography Techniques · Nanomaterials and Printing Technologies

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Affiliations

Max Planck Institute for Intelligent Systems Heisenbergstr. 3 70569 Stuttgart Germany

Institute for Materials Discovery University College London Kathleen Lonsdale Building Gower Place London WC1E 6BT UK

Department of Biophysical Chemistry University of Heidelberg INF 253 69120 Heidelberg Germany

Institute for Physical Chemistry University of Stuttgart Pfaffenwaldring 55 70569 Stuttgart Germany

References

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