Topology Optimization of High‐Performance Optomechanical Resonator

Abstract High quality mechanical resonators are critical for driving advances in quantum information technologies, precision sensing, and optomechanics. However, achieving compact resonator designs that maintain high performance is a key challenge. In this study, a new class of compact resonators optimized to operate at higher‐order eigenmodes is presented, achieving both high frequencies and enhanced quality factor‐frequency ( Qf ) products. By employing topology optimization to maximize the damping dilution factor, these resonators achieve minimized edge bending losses and enhanced intrinsic damping. Their high‐( Qf ) performance and compact form factor position these resonators as promising candidates for applications in quantum information transduction, advanced optomechanical systems, and next‐generation sensing technologies.