Plasma‐Induced 2D Electron Transport at Hetero‐Phase Titanium Oxide Interface

Abstract Interfaces of metal oxide heterojunctions display a variety of intriguing physical properties that enable novel applications in spintronics, quantum information, neuromorphic computing, and high‐temperature superconductivity. One such LaAlO₃/SrTiO₃ (LAO/STO) heterojunction hosts a 2D electron liquid (2DEL) presenting remarkable 2D superconductivity and magnetism. However, these remarkable properties emerge only at very low temperatures, while the heterostructure fabrication is challenging even at the laboratory scale, thus impeding practical applications. Here, a novel plasma‐enabled fabrication concept is presented to develop the TiO₂/Ti₃O₄ hetero‐phase bilayer with a 2DEL that exhibits features of a weakly localized Fermi liquid even at room temperature. The hetero‐phase bilayer is fabricated by applying a rapid plasma‐induced phase transition that transforms a specific portion of anatase TiO₂ thin film into vacancy‐prone Ti₃O₄ in seconds. The underlying mechanism relies on the screening effect of the achieved high‐density electron liquid that suppresses the electron‐phonon interactions. The achieved “adiabatic” electron transport in the hetero‐phase bilayer offers strong potential for low‐loss electric or plasmonic circuits and hot electron harvesting and utilization. These findings open new horizons for fabricating diverse multifunctional metal oxide heterostructures as an innovative platform for emerging clean energy, integrated photonics, spintronics, and quantum information technologies.