Ultra‐Sensitive Dual‐Resonator Graphene Pressure Sensor with Temperature Self‐Compensation

Abstract Silicon resonator sensors have limitations in detecting small pressure changes due to their structural dimensions. Graphene nanomechanical resonators, with their ultra‐small thickness and excellent mechanical properties, offer the opportunity to break this limitation. Here, a highly sensitive graphene nanomechanical pressure sensor with integrated temperature self‐compensation is reported. It consists of two vacuum anode‐bonded graphene resonators: one is sensitive to pressure and temperature while the other to temperature only, allowing for the cancellation of thermal effects via detecting the difference in the resonant frequencies. A sensitivity of 24.1 kHz kPa ⁻¹ is achieved over the pressure range of 0.001 to 500 kPa, 68 times higher than the state‐of‐the‐art silicon pressure sensors. The full‐scale (FS) hysteresis error is 0.31% with a repeatability of 0.75% in three forward and reverse stroke pressure tests. Within the temperature range of −40 to 120 °C and the pressure range of 0.001 to 500 kPa, the maximum pressure error is 6.51 kPa, giving an accuracy of 1.302% FS. The high performance of the device makes it promising for applications in aerospace, automotive, and healthcare industries as well as other fields requiring high‐sensitivity pressure measurements.