DataVXAdvanced SciencePaper
journal article·2025-03Open access

Experimental Realization of On‐Chip Surface Acoustic Wave Metasurfaces at Sub‐GHz

Wan Wang, Maciej Baranski, Yabin Jin, Roland Salut, Djaffar Belharet, Jean‐Michel Friedt, Yongdong Pan, Yanxun Xiang, Fu‐zhen Xuan, Abdelkrim Khelif, Sarah Benchabane

Advanced Science· Volume 12· Issue 12
Publisher pageOpen full text
Source abstract

Abstract

Abstract Metasurfaces, consisting of subwavelength‐thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application of metasurfaces to manipulate on‐chip surface acoustic wave (SAW) at sub‐GHz frequencies requires further exploration since their wave functions are highly demanded in nanoelectromechanical systems (NEMS), sensing, communications, microfluid control and quantum processing. Here, the experimental realization of on‐chip SAW metasurfaces is reported, consisting of gradient submicron niobium (Nb) rectangular pillars positioned on a 128°Y‐cut lithium niobate (LiNbO3) substrate that operate at hundreds of megahertz. The proposed SAW metasurfaces are able to manipulate transmitted SAW wavefront functions by designing on‐demand pillar's profile distributions. Broadband subwavelength focusing effects as the typical functions of SAW metasurfaces are experimentally demonstrated. This study opens a door for realizing on‐chip SAW metasurfaces for diverse potential applications at micro‐ and nanoscale.
Source: crossref · Quality: baseline

Research context

Nanomaterials

OpenAlex topics: Metamaterials and Metasurfaces Applications · Acoustic Wave Phenomena Research · Antenna Design and Analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

School of Aerospace Engineering and Applied Mechanics Tongji University Shanghai 200092 China

CNRS, FEMTO‐ST Université de Franche‐Comté 15B avenue des Montboucons Besançon F‐25000 France

Shanghai Key Laboratory of Intelligent Sensing and Detection Technology School of Mechanical and Power Engineering East China University of Science and Technology Shanghai 200237 China

Shanghai Institute of Aircraft Mechanics and Control Shanghai 200092 China

College of Science and Engineering Hamad Bin Khalifa University Doha Qatar

Funding

National Key Research and Development Program of China · National Natural Science Foundation of China · H2020 European Research Council · China Scholarship Council · Shanghai Municipal Education Commission · Science and Technology Innovation Plan Of Shanghai Science and Technology Commission · China Association for Science and Technology

References (47)

Show source-provided references
1. 10.1038/nature1467810.1038/nature14678 ↗
2. 10.1038/ncomms1487110.1038/ncomms14871 ↗
3. 10.1038/s41928-022-00732-y10.1038/s41928-022-00732-y ↗
4. 10.1038/s41578-022-00465-610.1038/s41578-022-00465-6 ↗
5. 10.1038/nmat383910.1038/nmat3839 ↗
6. 10.1126/science.121071310.1126/science.1210713 ↗
7. 10.1126/science.123200910.1126/science.1232009 ↗
8. 10.1021/acsphotonics.1c0104110.1021/acsphotonics.1c01041 ↗
9. 10.1016/j.physrep.2016.04.00410.1016/j.physrep.2016.04.004 ↗
10. 10.1038/s41467-018-07990-510.1038/s41467-018-07990-5 ↗
11. 10.1038/ncomms655310.1038/ncomms6553 ↗
12. 10.1038/s41467-019-11430-310.1038/s41467-019-11430-3 ↗
13. 10.1088/1361-6633/abdab810.1088/1361-6633/abdab8 ↗
14. 10.1038/s41578-018-0061-410.1038/s41578-018-0061-4 ↗
15. 10.1126/science.aaf664410.1126/science.aaf6644 ↗
16. 10.1038/s41565-017-0034-610.1038/s41565-017-0034-6 ↗
17. 10.1103/PhysRevLett.119.03430110.1103/PhysRevLett.119.034301 ↗
18. 10.1073/pnas.200475311710.1073/pnas.2004753117 ↗
19. 10.1016/j.jmps.2017.11.02510.1016/j.jmps.2017.11.025 ↗
20. 10.1103/PhysRevApplied.15.02400510.1103/PhysRevApplied.15.024005 ↗
21. 10.1088/1361-6463/ab1b0410.1088/1361-6463/ab1b04 ↗
22. 10.1126/science.abn732510.1126/science.abn7325 ↗
23. 10.1038/s41378-020-00236-910.1038/s41378-020-00236-9 ↗
24. 10.1038/s41467-018-07911-610.1038/s41467-018-07911-6 ↗
25. 10.1039/D4LC00203B10.1039/D4LC00203B ↗
26. 10.1038/nphys221710.1038/nphys2217 ↗
27. 10.1038/s41586-018-0719-510.1038/s41586-018-0719-5 ↗
28. 10.1038/s41928-020-0414-z10.1038/s41928-020-0414-z ↗
29. 10.1016/j.snb.2011.08.07510.1016/j.snb.2011.08.075 ↗
30. 10.1016/j.snb.2017.11.18810.1016/j.snb.2017.11.188 ↗
31. 10.1039/D4LC00371C10.1039/D4LC00371C ↗
32. 10.1002/adfm.20221362510.1002/adfm.202213625 ↗
33. 10.1038/s41467-022-29019-810.1038/s41467-022-29019-8 ↗
34. 10.1007/s00339-018-1605-610.1007/s00339-018-1605-6 ↗
35. 10.1063/1.495316810.1063/1.4953168 ↗
36. 10.1515/nanoph-2018-022710.1515/nanoph-2018-0227 ↗
37. 10.1016/j.ijmecsci.2021.10659210.1016/j.ijmecsci.2021.106592 ↗
38. 10.1016/j.compgeo.2023.10585410.1016/j.compgeo.2023.105854 ↗
39. 10.1016/j.eml.2023.10208810.1016/j.eml.2023.102088 ↗
40. 10.1002/adfm.20221142210.1002/adfm.202211422 ↗
41. 10.1039/D1LC00711D10.1039/D1LC00711D ↗
42. 10.1146/annurev-fluid-010313-14141810.1146/annurev-fluid-010313-141418 ↗
43. 10.1103/PhysRevB.78.10410510.1103/PhysRevB.78.104105 ↗
44. Wu T.‐C. · Phys. Rev. B · 2009 · 79
45. 10.1038/s41578-020-0203-310.1038/s41578-020-0203-3 ↗
46. 10.1021/nl302516v10.1021/nl302516v ↗
47. 10.1103/PhysRevB.96.10431110.1103/PhysRevB.96.104311 ↗