Rational Design and Fabrication of MEMS Gas Sensors With Long‐Term Stability: A Comprehensive Review

Abstract With the growing demand for chemical information collection from the environment, miniaturized size and high sensitivity labeled microelectromechanical systems (MEMS) gas molecular sensing devices have emerged as a promising element in the development of machine olfactory. However, prolonged exposure to gas analytes often induces slow chemical transformations on the sensing film surface, leading to reduced chemical activity, performance degradation, and mechanical failures such as membrane cracking or delamination. In the real market, especially under harsh working environments, long‐term stability is a critical quality metric in gas sensor development. Therefore, the pursuit of MEMS gas sensors that offer both high sensitivity and extended lifespan becomes indispensable yet challenging. Thus, this review provides a comprehensive overview of recent studies and achievements in MEMS gas sensors, highlighting efforts aimed at enhancing their working stability. Key areas of focus include advancements in the chemical and physical characteristics of sensing films, as well as improvements in device structures. Furthermore, current limitations, perspectives, and future possibilities for designing and fabricating MEMS gas sensors with long‐term stability are discussed.