DataVXAdvanced Materials TechnologiesPaper
journal article·2023-03Open access

Terahertz Barcodes Enabled by All‐Silicon Metasurfaces for Process Control and Monitoring Applications (Adv. Mater. Technol. 5/2023)

Lingyun Zhang, Hao Ma, Zhenci Sun, Zilun Wang, Kebin Fan, Biaobing Jin, Rui You, Xiaoguang Zhao, Zheng You

Advanced Materials Technologies· Volume 8· Issue 5
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Source abstract

Abstract

Semiconductor Process Monitoring In article number 2201631, Zheng You, Xiaoguang Zhao, Lingyun Zhang, and co-workers present terahertz barcodes consisting of electromagnetic metasurfaces as effective materials for semiconductor process control and monitoring applications. Once interrogated through a spectrometer, the response of the barcode reveals status information about the deep silicon etching process, enabling real-time, in situ, and non-contact measurement of several critical parameters.
Source: openalex_inverted_index · Quality: baseline

Research context

Electronic materials

OpenAlex topics: Advanced biosensing and bioanalysis techniques · Terahertz technology and applications · Photonic and Optical Devices

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Affiliations

Department of Precision Instrument State Key Laboratory of Precision Measurement Technology and Instruments Tsinghua University Beijing 100084 P. R. China

Research Institute of Superconductor Electronics (RISE) School of Electronic Science and Engineering Nanjing University Nanjing 211111 P. R. China

Research Institute of Superconductor Electronics (RISE) School of Electronic Science and Engineering Purple Mountain Laboratories Nanjing University Nanjing 211111 P. R. China

School of Instrument Science and Opto‐electronic Engineering Beijing Information Science and Technology University Beijing 100016 P. R. China

References

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